Mohammad J. Farhani, and A.A. Jafari , translators. “Fabrication of Micro and Nano Electro Mechanical Systems Technology for Next Generation Sensors”. Journal of Integrated VLSI, Embedded and Computing Technologies , vol. 2, no. 2, Mar. 2025, pp. 27-35, https://doi.org/10.31838/JIVCT/02.02.04.