Fabrication of Micro and Nano Electro Mechanical Systems Technology for Next Generation Sensors. Journal of Integrated VLSI, Embedded and Computing Technologies , [S. l.], v. 2, n. 2, p. 27–35, 2025. DOI: 10.31838/JIVCT/02.02.04. Disponível em: https://ecejournals.in/index.php/JIVCT/article/view/186.. Acesso em: 19 apr. 2025.