Mohammad J. Farhani and A.A. Jafaritrans. 2025. Fabrication of Micro and Nano Electro Mechanical Systems Technology for Next Generation Sensors. Journal of Integrated VLSI, Embedded and Computing Technologies . 2, 2 (Mar. 2025), 27–35. DOI:https://doi.org/10.31838/JIVCT/02.02.04.